The FEI Small Dual Beam product family
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چکیده
Ever since the invention of the transistor and the possibility to integrate these on a large scale in integrated circuits, miniaturization of electronic devices has become pervasive throughout society. And not only electronic devices are subject to miniaturization, all kinds of man-made structures and products are being made smaller and smaller, in the process retaining their function, and often also obtaining properties and functions that before were not possible. Now a significant number of these deal with typical structures (well) below 100 nm, we are said to have entered the “nano-technology era”. Miniaturization is not so much a market trend as it is a trend in society.
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تاریخ انتشار 2004